LAM Research Tech Talk: Equipment Intelligence for Semiconductor Fabrication

Sarah Khanniche sarahkha at mit.edu
Fri Mar 16 11:58:35 EDT 2018


LAM Research Tech Talk: Equipment Intelligence for Semiconductor Fabrication



The world is changing and the electronics industry is changing the

world. Moore’s Law has made computing power readily available and Lam

Research believes that artificial intelligence will disrupt everything,

including our own industry. Lam Research develops intelligent equipment

that utilizes integrated sensors, real-time analytics, machine learning

algorithms, and big data management. In this presentation, I will review

the challenges of process control and technology advances in

semiconductor manufacturing.



Hosted by Keith Wells, Chief Engineer, Lam Research



Tue, March 27, 2018

3:00 PM – 4:00 PM EDT

Star Conference Room- 32-D463, Ray and Maria Stata Center



Link to Register-

https://www.eventbrite.com/e/lam-research-tech-talk-equipment-intelligence-for-semiconductor-fabrication-tickets-43750934222



Keith Wellsis the Chief Engineer and a Corporate Vice President

overseeing Systems, Software and Controls in the office of the CTO at

Lam Research. He is responsible for the execution of advanced tool and

process control initiatives across the Lam product line. Prior to

joining Lam Research, he spent 27 years at KLA-Tencor in the development

of advanced optical and E-Beam inspectors. In his technical roles, he

oversaw the development of advanced light and electron optics, imaging

sensors, high speed data acquisition, plasma based light sources, image

computer development, and algorithm development including AI techniques

for wafer inspection applications. In his business roles, he served as

General Manager of the Electron Beam Division from 2006 to 2010 and then

as the General Manager of the Optical Inspection Division from 2010 to

2015. Keith holds a BA in Physics from Whitman College and an MS in

Solid State Physics from Washington State University.



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